Download Ebook Metal Impurities in Silicon-Device Fabrication (Springer Series in Materials Science)
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Book Details :
Published on: 2012-10-21
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Original language: English
This up-to-date monograph provides a thorough review of the relevant data and properties of the transition-metal impurities generated during silicon-sample and device fabrication. The different mechanisms responsible for contamination are discussed, and a survey is given of their impact on device performance. The specific properties of the main and rare impurities in silicon are examined, as well as the detection methods and requirements in modern technology. This new edition includes important recent data and many new tables. Metal Impurities in Silicon-Device Fabrication - Springer Springer Series in Materials Science. ... Metal Impurities in Silicon-Device Fabrication Copyright 2000 DOI Metal Impurities in Silicon-Device Fabrication (Springer ... Metal Impurities in Silicon-Device Fabrication (Springer Series in ... Metal Impurities in Silicon-Device ... Series: Springer Series in Materials Science ... Metal Impurities In Silicon Device Fabrication Springer ... ... Metal Impurities In Silicon Device Fabrication Springer Series In Materials Science Vol 24 METAL IMPURITIES IN ... silicon device fabrication springer series in ... Metal Impurities in Silicon-Device Fabrication - Springer Springer Series in Materials Science. ... Metal Impurities in Silicon-Device Fabrication Copyright 1995 DOI Metal Impurities in Silicon-Device Fabrication (Springer ... Buy Metal Impurities in Silicon-Device Fabrication (Springer Series in Materials Science ... Series: Springer Series in Materials Science ... Metal Impurities in Silicon-Device Fabrication - Springer Metal Impurities in Silicon-Device Fabrication treats the transition-metal impurities generated during the fabrication ... Springer Series in Materials Science Series ... Metal Impurities In Silicon Device Fabrication Springer ... Metal Impurities In Silicon Device Fabrication Springer Series In Materials Science ... metal impurities in silicon device fabrication springer ... metal impurities ... Metal Impurities In Silicon Device Fabrication Springer ... Metal Impurities In Silicon Device Fabrication Springer Series In ... springer metal impurities in silicon device ... materials science vol 24 devi Metal ... Metal Impurities In Silicon Device Fabrication Springer ... Metal Impurities In Silicon Device Fabrication Springer Series In ... science vol 24 24 v Metal impurities in ... Springer Series In Materials Science Vol ... Metal Impurities In Silicon Device Fabrication Springer ... Title: Metal Impurities In Silicon Device Fabrication Springer Series In Materials Science Vol 24 PDF d0cdf09b68ce18fd4255afc55cf0160e Author Miami University ...
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